Chemistry of Atomic Layer Deposition eBook

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This book will help chemists and non-chemists alike understand the fundamentals of surface chemistry and precursor design, and how these precursors drive the processes of atomic layer deposition, and how the surface-precursor interaction governs atomic layer deposition processes. The underlying principles in atomic layer deposition rely on the chemistry of a precursor with a surface.

This is a digital product.

Additional ISBNs
9783110712537

Chemistry of Atomic Layer Deposition 1st Edition is written by Seán Thomas Barry and published by De Gruyter. The Digital and eTextbook ISBNs for Chemistry of Atomic Layer Deposition are 9783110712599, 3110712598 and the print ISBNs are 9783110712513, 3110712512. Additional ISBNs for this eTextbook include 9783110712537.